COBRA Semicon Dry Screw Vacuum Pumps

Ultimate pressure: 0.001 - 0.03 hPa(mbar)

Nominal pumping speed 50 Hz: 70 - 7385 m³/h

Nominal pumping speed 60 Hz: 85 - 7385 m³/h

COBRA Semicon dry screw vacuum pumps are extremely efficient when used in highly demanding processes such as semiconductor, solar module and flat screen production, and in numerous industrial coating applications.

Efficient and reliable

Equipped with high-efficiency motors, COBRA Semicon screw vacuum pumps offer excellent energy savings potential. The simple design incorporates proven Busch screw profiles (optionally with an additional directly flange-mounted Roots vacuum pump), making the COBRA Semicon an extremely powerful, reliable and low-maintenance vacuum generator.


COBRA Semicon screw vacuum pumps are available in a wide variety of sizes and versions, permitting a perfect match to any process. Their compact construction simplifies installation, even when space is limited. Featuring the highest pumping speed in their class, these pumps offer the largest throughputs (even with hydrogen) and extensive tolerance to particles.

COBRA Semicon

COBRA – the next level of high capacity harsh duty vacuum pumps.